Turbo Pumping Systems

Turbomolecular pumping systems are the most reliable and cost-effective means of producing high vacuum. They are portable, fast-starting, and require little in the way of support systems.

Varian offers many choices of turbomolecular pumping systems, with pumping speeds from 40 to 1000 liters per second. The systems are fully assembled on either roll-around carts or rugged stationary platforms. All pumps have silicon-nitride ceramic bearings for a long, clean, and virtually maintenance-free life. We offer standard turbomolecular pumps in addition to the wide-range Varian MacroTorr pumps for more demanding applications.

Varian MacroTorr pumps deliver the highest speed/compression-ratio performance in the smallest envelope. These are true wide-range pumps, capable of operating at higher foreline pressures than standard turbomolecular pumps. They can be used in conjunction with dry scroll, or diaphragm backing pumps, yielding a totally hydrocarbon-free pumping system.

Our turbopump controllers are microprocessor-based frequency converters with self-diagnostic and protection features to insure the highest degree of reliability. They display all of the relevant operating parameters and pump status information.

Should you not find a turbo system in our catalog to meet your requirements, please contact your local Varian representative. We also specialize in designing and building custom vacuum systems. We can provide just the right vacuum solution to meet your requirements.

Our experts go the extra mile to develop precisely the right solution for your needs. We’ll help you put our highly reliable, high performing pumps to work and help you get even more out of the solution through our expert training and support.