Solutions For Semiconductor Fabrication

Facing huge capital investment costs, manufacturers and users of semiconductor production equipment strive mightily to improve throughput and maintain uptime. As a key element of such tools, the performance of the vacuum systems can greatly affect their success. Varian, Inc. can help, once again providing innovative, dedicated vacuum solutions that reduce cycle time, extend service intervals, and maximize uptime, and that are backed by industry-leading support programs that continue throughout the lives of the production tools.

Turbo Pumps
Turbo-V 81
Turbo-V 301 Navigator
Turbo-V 551 Navigator
Turbo-V 701 Navigator
Turbo-V 1001 Navigator
Turbo-V 3K-T

Scroll Pumps
SH-110
TriScroll 300
TriScroll 600

Measurement
Active Gauges
Transducers
Controllers

Leak Detection
VS Series
PHD-4

Components
All Valves
Flanges & Fittings

Application Note:

Leak Testing Process Gas Components (.pdf, 220 KB)

More information on Leak Testing Process Gas Components and Systems for Semiconductor Manufacturing

Solutions For...

Industrial Vacuum
Leak Detection
Mass Spec
R & D
Semiconductor Fab
Microscopy

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