Facing huge capital investment costs, manufacturers and users of semiconductor production equipment strive mightily to improve throughput and maintain uptime. As a key element of such tools, the performance of the vacuum systems can greatly affect their success. Varian, Inc. can help, once again providing innovative, dedicated vacuum solutions that reduce cycle time, extend service intervals, and maximize uptime, and that are backed by industry-leading support programs that continue throughout the lives of the production tools.
Turbo PumpsTurbo-V 81Turbo-V 301 NavigatorTurbo-V 551 NavigatorTurbo-V 701 NavigatorTurbo-V 1001 NavigatorTurbo-V 3K-T
Scroll PumpsSH-110TriScroll 300TriScroll 600
MeasurementActive GaugesTransducersControllers
Leak DetectionVS SeriesPHD-4
ComponentsAll ValvesFlanges & Fittings
More information on Leak Testing Process Gas Components and Systems for Semiconductor Manufacturing
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