Solutions For Semiconductor & Microscopy Instruments

Manufacturers of electron microscopes and surface analysis systems face continually increasing requirements for accuracy, resolution, and throughput. Varian, Inc. is there to help, delivering application-specific vacuum pumping and measurement solutions that are stable, reliable, and virtually vibration-free. We back these technology performers with industry-leading support programs to assure maximum uptime, around the world.

Ion Pumps
VacIon Plus 20
VacIon Plus 40
VacIon Plus 55
VacIon Plus 75
Miniature & Small

Turbo Pumps
Turbo-V 81
Turbo-V 301 Navigator

Scroll Pumps
SH-110
TriScroll 300
TriScroll 600

Valves
All Valves

Measurement
CT-100
Eyesys ConvecTorrâ„¢
Eyesys Mini-B/A
Eyesys Mini-IMG

Application Note:

Vacuum Solutions for Electron Microscopy Applications (.pdf, 355 KB)

More information on Vacuum Solutions for Electron Microscopy Applications

Solutions For...

Industrial Vacuum
Leak Detection
Mass Spec
R & D
Semiconductor Fab
Microscopy

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