Products / Wafer Handling Platforms

Platforms are the heart of any STS system and deliver the best in class substrate transport in terms or reliability and productivity. STS offers a range of platforms suitable for applications geared to high volume production as well as introductory systems for R&D. STS' Platforms are listed below:

• CPX - cluster tool with 2 vacuum cassettes with up to 4 process chambers
• VPX - cluster tool with 1 vacuum cassette with up to 3 process chambers
• MACS - single process chamber with atmospheric cassette system for automatic handling of up to 50 wafers
• MPX - single process chamber with vacuum carousel loadlock (up to 4 wafers)
• LPX - single process chamber with single-wafer vacuum loadlock