CuCMP Wastewater Treatment & Recycle

Copper Select™ technologies provide reliable and cost effective treatment of CuCMP slurries produced in the integrated circuit board manufacturing industry.

The Copper Select™ system pH adjusts the copper-bearing polishing slurry to solubilize all of the copper in the feed. Small doses of polymer are added to the feed and the ceramic membrane system concentrates the slurry up to 10-15% solids.

Copper is rinsed from the concentrated slurry and downstream carbon and chelating resin canisters remove peroxide and copper from the permeate. Portions of this low level copper/peroxide water is recycled back to the membrane system for flushing the copper from the concentrated feed slurry and back to the carbon column and chelating resins.

The carbon/IX treated liquid can be run through RO/mixed bed IX canisters to raise the liquid quality to a level suitable for recycle. The exiting slurry will contain low levels of peroxide and copper, suitable for direct disposal into the customer's current wastewater treatment system.

Features and Benefits

• Removal of suspended solids
• Copper removal from rinse waters, concentrations and slurries
• Up to 80% of the CMP wastewater can be reclaimed

Product Documentation

Copper CMP Wastewater Treatment and Reclamation