Whatever your MEMS / Nanotechnology requirements, SUSS has the Solution SUSS: Enabling the Commercialization of the Micro and Nanosystems World Micro-Electro-Mechanical-Systems (MEMS) or their newer siblings NEMS
(Nano-Electro-Mechanical-Systems) have an enormous impact across the industrial spectrum - from biotechnology, through medical devices, process control to advanced mechanical systems for industrial and consumer markets, such as IT peripherals, multimedia, communications, and automotive applications. SUSS has been at the forefront of providing equipment for the very challenging microsystems production and test process since the mid-90's and there are several reasons why SUSS has become the number one supplier of choice.
 SUSS Supplies Equipment for Key MEMS Process Steps
No other company provides such a range of equipment with many systems based on the same platform ensuring unprecedented reliability, upgradeability and, when the need arises, serviceability. Plus, when it comes to precise alignment, who better to trust than the leading photolithography company? Because the same alignment stage is used in both SUSS' lithographic tools and bonding tools, any alignment process can be relied upon to be exact. Indeed, only SUSS can guarantee submicron post bond alignment accuracy. SUSS is also heavily involved in nanoimprint lithography and such systems are already in use in optical MEMS. Lets not forget our probe systems which are unique in providing non-electrical stimuli and detection already at wafer-level. SUSS. Taking the guesswork out of MEMS production and test
Modular, Flexible Equipment for a Diversified Market
MEMS manufacturers require equipment which can adapt quickly to changing applications without significantly increasing cost. SUSS equipment is specifically designed to be modular and flexible allowing users to quickly change-over as and when the need arises. Manage Production Demands and Capacity Needs
SUSS manual and automated equipment is based on the same technology so transferring processes from pre to full production is worry-free. The unique SUSS cluster principle means that further modules can be added at any time so that the system can be budgeted for depending on actual requirements SUSS is the Specialist in Equipment for 3D Device Production
With mask aligners that are renowned for their large depth of focus, coaters that highly accurately spin or spray thick resists and wafer bonders that perform the most accurate alignment while applying an exact force and temperature, SUSS is the company of choice for developing devices with high aspect ratios. | The lists of MEMS applications and SUSS innovations are endless. Click on the links below to find out more about just a few state-of-the-art applications and the corresponding SUSS innovations: Pressure Sensors Accelerometers and Gyroscopes RF MEMS Micro-Mirror Arrays IR Sensors / Detectors |
