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Next-generation ammonia heating systems for LED and LCD manufacturing - delivering high flow rates with increased reliability

Praxair Electronics introduces its next-generation SureFlow™ systems . The new, cost-effective SureFlow equipment offers a unique heating system (patent pending) to address the challenges associated with the thermodynamic properties of ammonia. Praxair Electronics additionally offers a complete portfolio of bulk gas systems for electronic specialty gases including silane, nitrogen trifluoride, nitrous oxide and halocarbons.

The SureFlow equipment product line offers automatic gas panels, heating systems and a PLC controller providing reliable, configurable control and system flexibility. The optional SureFlow dual controller ensures redundancy with automatic second-source switchover for system backup.

Upfront system modeling assures trouble-free operations
Praxair SureFlow system engineers work with customers to provide system solutions that safely deliver high-flow rates with the flexibility and redundancy required for increased reliability.

Using verifiable fluid thermodynamic, thermophysical properties and proven software, Praxair engineers use predictive modeling to customize systems to fab-specific applications. Computer modeling validates and predicts flow capacity, flow resistance for all components, condensation points, heat addition points, and system response to de-bottlenecking changes in the existing flow system. The modeling system can also account for varying temperature and its impact on the supply system operation.

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