AL110-12 Wafer Loader and Inspection Station

Model AL110-12 wafer loader and manual inspection system for 300mm wafers. AL110-12 with Wafer Loader

The AL110-12 is FOUP and FOSB compatible and a superb solution for lower cost back-end inspection requirements. A Class 1 mini-environment is also available as an option.

Macro illumination uses both scattering and focused illumination for inspection and easy detection of film problems, scratches, and many other macro defects. A metal halide lamp and fiber optic provide bright illumination for the entire area of the 300mm wafer with a cold light. The safe and ergonomic AL110-12 can be set to a variety of inspection modes so the operator can maintain a relaxed position, even during long periods of operation.

The AL110-12 system has top macro, back macro, and microscope inspection. The robot arm with vacuum pick-up provides non-contact centering. The system uses Olympus' MX61 microscope for excellent resolution and precision quality optical imaging. The stage has 360 degree rotation. The system's footprint is 1285mm x 1500mm and the height of the cassette position is a standard 900mm. The new 300mm loader is an extension of Olympus' loader series for 150mm and 200mm wafers.