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Wet Process Chemicals

The finer the circuit geometry, the purer your chemicals need to be. To meet those needs, Mallinckrodt Baker has expanded its line of J.T.Baker fab process chemicals to include products with 1.0 and 0.1 ppb trace-metal impurity levels. In addition to J.T.Baker fab process solvents and acids, we offer a line of mixed acid, aluminum, and buffered oxide etchants. All of these products are available in a variety of container configurations including reusable containers.

Wet Process Chemicals

 BakerClean RCA Replacement
As the industry moves to smaller geometries, complete impurity removal from the wafer surface is essential. Consequently, device manufacturers have been driven to use 1.0 ppb and even 0.1 ppb materials to make up their SC-1 and SC-2 baths. This requirement for ultra-high purity baths has led to shorter bath lives due to the re-deposition of particles and metals onto the wafers. To give you better performance at a lower total cost, Mallinckrodt Baker has developed a unique one-step cleaning process utilizing alkaline/surfactant based chemistries called JTB-100 and JTB-111 cleaners.

For more information contact our Application Engineering group at 1-800-JTBAKER (800-582-2537), extension 9346, outside the US 1-908-859-9346, or micro.mbi@tycohealthcare.com.

J.T.Baker Grade Trace Impurity Level Device Geometry SEMI Grade SEMI Tier
CMOS 200-10-ppb 1.2µm 1 -
Finyte/VLSI (Europe) 10-ppb 0.8 to 1.2 µm 2 A
Finyte 1 1.0-ppb 0.2 to 0.8 µm 3 B
ULTRYTE 0.1-ppb 0.09 to 0.2 µm 4 C

Interested in learning more about our wet process chemical product line?
View the Microelectronics Catalog

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