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Technical Papers

Publications and Papers
English
Automatic Viscosity-Controlled Production of Photoresist
209kB
Effect of Shear Stress and the Influence of Different Pump Methods on CMP Slurry
143kB
Effect of a Maglev Centrifugal Pump on Slurry Health and Defect Rates
309kB
Effect of Pump Pulsation and Particle Loading on Membrane Filter Retention
164kB
Effect of Particle Size Distribution on Filter Lifetime in Three Slurry Pump Systems Presentation
175kB
Effect of Particle Size Distribution on Filter Lifetime in Three Slurry Pump Systems Paper
129kB
Flow Control and Enhanced Filter Life Time in CMP Slurry Delivery Systems
143kB
Effect of Shear and Cavitation on Different CMP Slurries
323kB
Slurry Pump Comparison with Different Slurry Types
278kB

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