Products for the Semiconductor Industry

Mixers

Levitronix offers mixers for the Semiconductor Industry based on our bearingless motor technology. The rotors within our mixers are driven without the use of a shaft by generating magnetic fields through the walls of the mixing tank. Unlike other magnetic stirrers, Levitronix' mixers rotate the magnet without contact with the mixing chamber by employing magnetic levitation. Thus the mixers are free of mechanical wear and create virtually no particles. Electronic control allows the creation of custom speed patterns including reversing of the speed, which helps to decrease the mixing time. Precise electronic measurement of the rotor torque allows monitoring of fluid properties including viscosity and density. Levitronix' mixers are gentle on CMP slurries and other sensitive fluids due to our low-shear design. For the same reason, Levitronix' mixers also generate fewer bubbles and foam compared to conventional designs. The small size allows simple integration into blending systems. Low noise and vibration also prevent interference with weight sensors and other equipment.

Figure 1: Demonstration unit of a bearingless mixer utilizing a BSM-1 motor

Figure 2: Bearingless mixer design based on a BSM 3.1 motor. The flange can be welded to the mixing tank	Figure 3: The motor can be easily removed from the tank flange without disturbing the fluid barrier

Figure 4: Dimensions of a bearingless mixer with a BSM 3.1 motor