PVD Targets and Coil Sets

  • Leading supplier of targets to IC industry
  • All major 200mm & 300mm target configurations and purity specifications
  • Strong position in primary metals – Al/Ti, Cu/Ta
  • Specialized targets
  • Patented ECAE technology offering ultrafine grain size
  • Precious metals
  • IMP Coil sets – Ta, Ti, Cu
  • Multiple particle-reducing and life-enhancing technologies

Honeywell is an approved vendor for most OEM designs for 200mm and
300mm PVD applications.

Award-winning Honeywell ECAE technology achieves ultrafine grain size and high material strength for longer target life and higher yield.

Copper IMP coil set — just one of many types provided by Honeywell.

 

Visit Honeywell Electronic Materials | Visit Semiconductor International | Contact Us

Information hosted in the Technology Library is supplied by Semiconductor International partners and is not created or endorsed by Semiconductor International staff.