From FSI International, the world’s leader in batch spray processing, the MERCURY® System satisfies your processing needs at a low cost.

• Low COO
• High throughput
• Small footprint
  
  Improvements in Photoresist Strip and Post–Ash Clean (PDF, 68 KB)

Applications:
FEOL post-ash clean and photoresist strip, FEOL film strip, FEOL critical clean

Features:

• Proprietary chemical mixing manifold, with variable valve control
• Single-pass chemistry use
• Options include ozone processing (piranha replacement)

Available configurations:

• Semi-automated 200mm
• Semi-automated 150mm
• Semi-automated 125mm
• Semi-automated 100mm