MAGELLAN^®

Discover a new world of immersion capabilities

MAGELLAN^® Immersion Cleaning System

In direct response to customer input, the MAGELLAN® System sets new standards in immersion technology.

• Shorter cycle time: Reduce your production time by up to 40% through MAGELLAN® System’s multi-function tanks with super-efficient mixing.
• Breakthrough versatility and extendibility: Reduce your capital outlay. One MAGELLAN® System can support multiple processes and successive technology nodes.
• Process performance: Improve yield and reduce learning curve with MAGELLAN® System’s patented technologies.
• Ultra-small footprint: Conserve your valuable cleanroom space with modular configuration, up to 40% smaller than traditional wet benches.

Applications:
FEOL critical clean, FEOL photoresist strip and post-ash clean, Oxide etch, Nitride etch, wafer reclaim

Features:

• Modular configuration from 2 to 7 process modules
• Proprietary chemical mixing manifold on each process module, with variable valve control and Advanced Process Control
• STG® (Surface Tension Gradient) rinse/dry technology for watermark-free dry based on Marangoni principle
• SymFlow® in-situ oxide etching with APC etch control
• Controlled, variable thickness DIO3 oxide regrowth
• Advanced megasonics capabilities
• Advanced robotics and materials management that is fast, flexible, reliable, and aids process performance

Available configurations:

• Fully automated 300mm
• Fully automated 200mm (bridging to 300mm)