Semiconductor Equipment Services

Air Products

Semiconductor Equipment Services Offerings

Maximize the life of your assets

At Air Products, we know semiconductor fabs inside and out, as we’ve been a leading supplier to the industry for more than 25 years. Through that experience, we understand the challenges facing fabs today and know that many of those challenges are in the details.

Drawing on our expertise and extensive technical capabilities, Air Products is enhancing our portfolio of products to include a broad range of services for semiconductor fabs. These services will enable you to focus on what you do best and lower your cost of ownership through increased tool uptime and decreased maintenance costs.

Air Products' Chandler Clean Room Facility

World-Class Refurbisher of Fab Equipment

Multi-platform capability:

Air Products technicians have cumulative experience on ~150 different makes and models of fab equipment

Service support: decontamination, deinstallation, upgrades, downgrades, size changes, retrofits, special engineering projects, installations, start-up, qualification, training, and service contracts

Local field service provided in China, Japan, Singapore, South Korea and Taiwan as well as throughout Europe and North America

OEM authorized to support legacy equipment:

Ownership of and access to IP

Responsible for >1100 tools worldwide, including parts and field service

Parts kit, repair and exchange programs

Uptime performance programs

Parts banks in China, Japan, Netherlands, Scotland, Singapore, South Korea, Taiwan and United States

Facility designed as a Class 10 clean room with sub-fab facilities:

Refurbished ~200 major systems to date

Remarketing alliance with Babcock and Brown Electronics Management

Responsible Care ^®member

Service benefits that really add up

ISO 9001-2000 registered since 2002
Global support with local service in local language
24/7 support available
Reliable and guaranteed service levels
Cost-effective outsourcing
Focused on your needs
Customized service packages
Technical Know How
The right service when you need it
Proven leaders in Safety
Over 25 years experience in the industry

Comprehensive Chiller and Heat Exchanger Service Program

State-of-the-art testing facilities in Europe and North America
All repaired and refurbished systems tested in a simulated fab environment
Automated recipe control that supports uniform testing methods
PCW loop and universal electrical utilities
Capable of servicing a broad spectrum of manufacturers and models
EPA certified technicians
6 month warranty on all repaired equipment (i.e. parts repaired or replaced)
1 year warranty on all refurbished equipment

Contact Information
To obtain additional more comprehensive information, please contact your local Semiconductor Equipment Services Group office.
Corporate Headquarters Air Products and Chemicals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195-1501 Tel 800-654-4567 Tel 610-706-4730 Fax 800-272-4449 Fax 610-706-6890	Southwest Air Products and Chemicals, Inc. 300 N. 56th Street Chandler, AZ 85226 Tel 800-837-2724 Tel 480-893-4500 Fax 480-893-4599 E-mail maxlife@airproducts.com
The Netherlands Air Products Nederland B.V. Technical and Training Center Oostkanaaldijk 110 6534AL Nijmegen The Netherlands Tel +31 (0)24 3523 640 Fax +31 (0)24 3523 659 E-mail eesparts@airproducts.com	Asia Japan Air Products Japan, Inc. 21F Muza Kawasaki Central Tower 1310, Omiya-cho, Saiwai-ku Kawasaki City Kanagawa 212-8554 Japan Tel 81 44 542 1594 Fax 81 44 542 1595 Email maxlifej@airproducts.com

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