The Air Products Emissions and Abatement Monitor Program was developed in 1993 in response to the semiconductor industry’s initiatives to baseline the emission of global gases from manufacturing activities, such as perfluorinated compounds (PFCs).

Figure 1: CF 4 emissions from dielectric etch process

Through our early efforts, Air Products developed analytical metrology and testing methodologies to measure gas phase emissions from process tools. Since then, Air Products has monitored emissions from thousands of semiconductor processes covering all aspects of semiconductor manufacturing. We have worked with IC manufacturers and OEMs globally to monitor their individual process emissions, evaluate suitable abatement strategies and optimize material consumption for many different types of semiconductor manufacturing processes. This monitoring has helped IC manufacturers to remain compliant with local, regional and national environmental regulations, as well as allow them to remain compliant with industry standard goals for reducing greenhouse gas emissions.

Air Products has the equipment and trained personnel to assist your company in determining semiconductor processing emissions factors and abatement efficiencies for your individual range of processes.

For additional information on our Emissions and Abatement System Monitoring Programs, please listen to our podcast or feel free to contact Robert Ridgeway.