Tachyon™ LithoCruiser

LithoCruiser is the industry's only integrated software suite for low-k1 lithography optimization. LithoCruiser analyzes and optimizes the most advanced scanner performance (including hyper-NA, immersion and polarization) and mask design simultaneously. It can be easily used to develop new lithography processes and optimize existing processes at the design, photomask and imaging levels.

LithoCruiser is tightly integrated with ASML's leading-edge scanners, enabling relevant information such as actual illumination profiles and volume manufacturing effects to be used in the analysis and optimization of wafer imaging performance. LithoCruiser is targeted for use by lithography technology development organizations of semiconductor manufacturers.