ASML’s PAS 5500 product line is based on a modular system architecture. This modularity allows users to build upon their capital investments, process knowledge and manufacturing experience. As an extensible system designed to meet both current and future lithography requirements, this technology platform provides increased system performance capabilities for each generation of lithography. With the introduction of high-NA KrF and ArF lenses, the PAS 5500 platform continues to meet the most advanced imaging requirements for volume production on 200-mm wafers.

Included in this product catalog is the PAS 5500 Pre-owned section. ASML selects the best pre-owned PAS 5500 machines available on the market and feeds them through a thorough factory Remanufacturing process, which brings them back to virtually as-new machines. These machines are offered against the original ATP specifications and with warranty for an attractive price.

ASML also facilitates the Direct Shipment of systems from one location to another without passing them through the factory. The coordination of these systems is so good that the systems can be made fully functional with minimal effort on-site. Possible candidate systems for Direct Shipment that need more repair effort go through a refurbishment process in one of a few selected ASML sites in order not to burden the customer with a long and unpredictable installation. The large advantage of Direct Shipments and Refurbished systems is the very fast availability. Also these systems come with a full specification and warranty. This variety of possibilities always allows customers to find the best possible solution in terms of price, quality and availability and makes ASML, as the OEM, the partner of choice when it comes down to pre-owned systems. Also for pre-owned systems ASML is committed to developing lithography solutions that provide the highest value of ownership for today’s and tomorrow’s imaging solutions.